Ref:

Zephyr HAF Series low flow 10 SLPM to 300 SLPM

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High precision digital airflow sensors

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Technical features
Number of axes
Technology
Maximum acceleration gmax
Output
Sensitivity
Total Error Band
Pressure
Output
Operating mode
Bidirectional
Amplified / Unamplified
Amplified
Max flow
20 SCCM
Output
Digitale
Size
Inlet outlet position
Megapixel
Resolution
CFA
Pixel size
Number of axes
Technology
Maximum acceleration gmax
Output
Sensitivity
Pole detection
Magnetic field strength
Output form
Accuracy Temperature
RH% accuracy
Housing
Precision
Output form
Housing
Measurement
Degree of freedom
1frequency
Size (mm)
Macro motion detection
Output
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